SEMINAR
DEPARTMENT OF CHEMICAL AND BIOMOLECULAR ENGINEERING
NORTH CAROLINA STATE UNIVERSITY
EB1 Rm 1010 (9 AM)
Tuning the chemical properties of thin film surfaces: From solid inorganic films to biosensors
Dr. Andrew Teplyakov
University of Delaware
EB1 Rm 1010 (9 AM)
Thin films are needed in many practical devices. The chemical control over the properties of thin film surfaces becomes ever increasing problem, especially for the miniaturized devices. This talk will give two very different examples of chemical surface modification of thin films. The chemical properties of titanium nitride-carbide (TiNC) and titanium nitride (TiN) films deposited on silicon show that the surface reactivity of nitride-based films can be modified precisely and reversibly by controlling the surface elemental composition. These materials are used as diffusion barrier films and therefore understanding their surface chemistry is key for controlling further deposition steps during interconnect metallization. The ability to control the reactivity of a deposited film offers unique opportunities in designing chemical modification schemes for a successful deposition onto these barrier films. A very different example will focus on the potential of coupling biomolecules with electronic elements. The problem is that so far very few actual devices with a practical function have been built based on such interfaces. We have developed the chemical path to produce and demonstrated the stability of interface of biological molecules, such as DNA, with semiconductor surfaces for bioelectronic sensing applications. Based on the interfacing shape-restricted DNA molecules with silicon, we propose a very sensitive DNA-FET biosensor: */nano/DNA-JUGFET*.