Parsons Research Group

thin films, surfaces, and nano-engineering

Department of Chemical and Biomolecular Engineering

We Study

Thin Film Synthesis.

We Expand

ALD Technology.

We Explore

New Device Applications.

Advanced nanometer–scale thin films have applications in optics, microelectronic systems, protective coatings, selective permeation and gas barrier layers, photovoltaic energy conversion devices, quantum well structures, and many others.

We are working to extend ALD into new and expanding areas, including Molecular Layer Deposition, where the chemical concepts of ALD are utilized for atomic–level integration of organic monomer and molecular building blocks into well defined thin films.

A new and growing focus is on modification of high surface area 3D structures, including nonwoven fibrous mats and natural and synthesized fabric structures for energy conversion devices, biological integration or separation systems.

Quick Facts


Research & Expertise

Prof. Parsons' expertise includes:
Thin Film Transistor (TFT) Devices and Manufacturing
Atomic Layer Deposition processing and equipment
Active Matrix Liquid Crystal Displays (AMLCDs) and other flat panel displays
Polymer materials - fibers and films
Cluster Tools and Equipment Design
Chemical Vapor Deposition, Plasma Enhanced CVD, Plasma Etching
Electronics materials, especially molecular, organic and inorganic thin films
Parsons' short CV, 1 2013


Dept. of Chemical and Biomolecular Engineering
Box 7905, 911 Partners Way
Raleigh, NC 27695
919 515 7553 (office)
919 515 7189 (lab)

Recent Publications

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