Group Alumni - PhD and MS Students
2009
Qing Peng PhD - now at Argonne National Labs
Jeong-Seok Na PhD - now at Novellus, San Jose CA
2007
Sang Oh PhD (Materials Science) - Novellus, San Jose, CA
Thesis: In-Situ Mass Spectroscopy Analysis of Metal ALD
G. Kevin Hyde PhD (Coll of Textiles, Fiber and Polymer Sci) -- Visiting Scientist, NC State
Thesis: Layer-by-layer and atomic layer deposition of films on textile fibers
2006
David Terry PhD -- Quality Chem. Labs, Wilmington NC
Thesis: Atomic layer deposition of high-k dielectrics and metal gate electrodes
2005
Changwoong Chu PhD -- Samsung, Korea
Thesis: Nanoscale electrode patterning and molecular electronic junction analysis
Keijin Park PhD -- Novellus, San Jose
Thesis: Atomic Layer Deposition of Ru and Rh for metal gate electrode applications
Jason Kelly PhD -- Post doc NC State Univ
Thesis: Surface Reactions in high-k dielectric deposition
Dipak Barua MS -- PhD, NC State
Thesis: Metal Deposition in Supercritical Fluids
2003
Powan Mehan MS
Tom Abatemarco MS
2002
Dong Niu PhD -- Novellus, Oregon
Thesis: Chemical Vapor Deposition of High-k Dielectrics Kevin Bray PhD -- K-Systems, Dayton Ohio
Thesis: Surface Transport Processes During Deposition on Hydrogenated Amorphous Silicon
2001
Atul Gupta PhD -- Varian Semiconductor, MA
Thesis: Reactions in Silicon and Low Temperature SiO2 Deposition
Amy Michel PhD -- Intel, Oregon
Thesis: Compound Semiconductors by Pendeo-Epitaxy (Bob Davis MTE, Chair)
2000
James J Chambers PhD -- Texas Instruments, Dallas TX Thesis: Physical and Electrical Properties of Yttrium Oxide High-k Dielectrics
1999
Ashfaqul Chowdhury PhD -- General Electric, Cleveland OH Thesis: In-situ Characterization of Plasma Deposition Processes
Tonya Klein PhD -- Chem Eng, U Alabama
Thesis: Advanced Dielectrics for TFT’s and for CMOS Devices
Chris Makosiej MS -- Schweiserhall, Inc., SC
Thesis: Barrier Properties of Dielectric Films on Plastics
1998
Tom Yang PhD(ECE) -- Unipac Optoelectronics, Taiwan Thesis: Full Self Aligned a-Si TFT’s and TFT’s on plastic substrates
1997
Walter Bill Read MS -- Intel, Phoenix Arizona
Thesis: Low Temperature Selective Area Deposition of Silicon
Easwar Srinivasan Ph.D. -- Novellus, San Jose, CA
Thesis: Fundamental Surface Reactions in Amorphous Silicon Deposition